アルバック機工株式会社 蒸着実験 動画 DEPOX Series_VTR350M
As for mass-production use, MLD is actually used for ink jet heads of our printers.
Ink jet heads are made by MEMS Micro Electro Mechanical System.
MLD layer prevent MEMS-made structures from sticking.
I sometimes heard the early works of MLD had been done in Japan.
But I did not know who.
In March, 2019, I had a chance to be introduced a book written by Dr.
I started to investigate how MLD was developed initially.
The writer contacted two key figures and heard how MLD has been 蒸着の例 />One contributor is Dr.
Atsushi Kubono who is now a professor of Shizuoka University.
Another critical figure is Dr.
Tetsuzo Yoshimura who is an honorary professor of Tokyo University of Technology.
I here write down the short history of early MLD developments.
October 20, 1987 A young student Kubono Senior student of Tokyo Institute of Technology gave oral speech in Japanese language at Japan Society of Applied Physics that he discovered monomers are deposited and perpendicularly arrayed using Vacuum Vapor Polymerization.
Vapor Polymerization is the technique to send two different monomers 蒸着の例 a reactor in order to create polymer.
Polymer could not be vaporized so we need to send two vaporized monomers for polymerization.
The 蒸着の例 is randomly arrayed through vapor polymerization, but Kubono discovered that polymer were perpendicularly arrayed by tuning temperature etc.
Another remark is that his discovery was self-limited process.
Only Material A can be reacted and deposited on Material B but not on the same Material A while Material A and B were sent together into a chamber.
Kubono belonged to Dr.
Material A: Benzene-1,4-dicarboxaldehyde Material B: p-phenylenediamine, PPD According to Dr.
Yoshimura, he was inspired by Atomic Layer Epitaxy ALE technology.
And he developed MLD based on vapor polymerization researches by IBM, Kubono and Ulvac.
While Kubono delivered two different materials together in one chamber, Yoshimura separated delivery of Material A and B and add purge times between pulse A and B.
Yoshimura became a professor of Tokyo University of Technology and started MLD researches again including polymer arrayed growth on SAM, quantum dots etc made by MLD 蒸着の例 until 2017.
Yoshimura published a book.
Comment Interestingly, a senior student found the root 蒸着の例 MLD.
According to the very person Dr.
Kubono, he tried one small idea to open up this new technology — perpendicularly arrayed growth of polymer.
He was a M1 student when he disclosed his discovery https://games-money-spin.site/1/798.html as mentioned above.
I would like to say that young researchers have sometimes done great discoveries like many of Novel Prize winners.
And even in ALD community, we have this good example.
I wish apologise, サクラメント空港近くのカジノ opinion ALD researchers or even aged with young spirits!
Note The above dates of papers are when they are received or accepted.
Acknowledgment I thank you very much for Dr.
Kubono who sent me their original papers and even explained to me how MLD had been developed.
With my appreciation, I am very honored to hear their experiences.
I also like to thank to Dr.
Hiroshiba, National Institute of Technology, Maizuru College.
Without his introduction to Dr.
And I thank Dr.
Kuwae, Waseda University for his help to find some academic papers for me.
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